Electrically coupled MEMS bandpass filters Part II. Without coupling element
نویسندگان
چکیده
This paper, the second of two parts, introduces electrostatic coupling of micromechanical resonators for implementation of high-order narrow-bandwidth bandpass filters. The concept of electrostatic coupling of closely spaced microresonators and its electromechanical modeling is presented. Electrostatic coupling of resonators does not require any distinct physical coupling elements. The electrostatic coupling strength between the resonators is sharply dependant on the applied polarization voltages to the resonators. Hence the coupling strength and consequently fi a o d ©
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